| 碳化硅材料腐蚀炉 | |
| 董林; 孙国胜; 赵万顺; 王雷; 刘兴昉; 刘斌; 张峰; 闫果果; 郑柳; 刘胜北 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2012-07-25 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体材料 |
| Application Date | 2012-04-11 |
| Application Number | CN201210105183.4 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25312 |
| Collection | 中科院半导体材料科学重点实验室 |
| Recommended Citation GB/T 7714 | 董林,孙国胜,赵万顺,等. 碳化硅材料腐蚀炉. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 碳化硅材料腐蚀炉.pdf（344KB） | 限制开放 | License | Application Full Text | |||
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