| 一种等离子体耦合模式激光器 | |
| 郑婉华; 付非亚; 王宇飞; 晏新宇; 周文君; 陈微 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2012-09-12 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体材料 |
| Application Date | 2012-05-02 |
| Application Number | CN201210135204.7 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25269 |
| Collection | 中科院半导体材料科学重点实验室 |
| Recommended Citation GB/T 7714 | 郑婉华,付非亚,王宇飞,等. 一种等离子体耦合模式激光器. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 一种等离子体耦合模式激光器.pdf（1034KB） | 限制开放 | License | Application Full Text | |||
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