SEMI OpenIR  > 中科院半导体材料科学重点实验室
硅基III-V外延材料图形异质键合均匀轴向力施力装置
张冶金; 郑婉华; 渠红伟
Rights Holder中国科学院半导体研究所
Date Available2012-08-22
Country中国
Subtype发明
Subject Area半导体材料
Application Date2012-05-08
Application NumberCN201210139758.4
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25268
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
张冶金,郑婉华,渠红伟. 硅基III-V外延材料图形异质键合均匀轴向力施力装置.
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硅基III-V外延材料图形异质键合均匀轴(315KB) 限制开放LicenseApplication Full Text
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