硅基III-V外延材料图形异质键合均匀轴向力施力装置 | |
张冶金; 郑婉华; 渠红伟 | |
Rights Holder | 中国科学院半导体研究所 |
Date Available | 2012-08-22 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 半导体材料 |
Application Date | 2012-05-08 |
Application Number | CN201210139758.4 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/25268 |
Collection | 中科院半导体材料科学重点实验室 |
Recommended Citation GB/T 7714 | 张冶金,郑婉华,渠红伟. 硅基III-V外延材料图形异质键合均匀轴向力施力装置. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
硅基III-V外延材料图形异质键合均匀轴(315KB) | 限制开放 | License | Application Full Text |
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