| 硅基III-V外延材料图形异质键合均匀轴向力施力装置 | |
| 张冶金; 郑婉华; 渠红伟 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2012-08-22 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体材料 |
| Application Date | 2012-05-08 |
| Application Number | CN201210139758.4 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25268 |
| Collection | 中科院半导体材料科学重点实验室 |
| Recommended Citation GB/T 7714 | 张冶金,郑婉华,渠红伟. 硅基III-V外延材料图形异质键合均匀轴向力施力装置. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 硅基III-V外延材料图形异质键合均匀轴（315KB） | 限制开放 | License | Application Full Text | |||
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