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SEMI OpenIR  > 中国科学院半导体研究所（2009年前）
Thermodynamic and dynamic analyses of GaAs MOVPE process
Yang Hui, Liang Junwu, Deng Lishen, Zeng Lianxi , Zhang Xia
1992
Conference NameThe First Pacific Rim International Conference on Advanced Materials and Processing
Conference Date1992
Conference PlaceTMS, Warrendale, PA.
Document Type会议论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24949
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 Yang Hui, Liang Junwu, Deng Lishen, Zeng Lianxi , Zhang Xia. Thermodynamic and dynamic analyses of GaAs MOVPE process[C],1992.
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