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亚波长光栅仿真理论、制备技术和减反射性质的研究
陈熙
Subtype博士
Thesis Advisor陈良惠
2011
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline物理电子学
Subject Area光电子学
Date Available2011-06-03
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20749
Collection纳米光电子实验室
Recommended Citation
GB/T 7714
陈熙. 亚波长光栅仿真理论、制备技术和减反射性质的研究[D]. 北京. 中国科学院研究生院,2011.
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