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Residual stress in AlN films grown on sapphire substrates by molecular beam epitaxy 期刊论文
Superlattices and Microstructures, 2016, 卷号: 93, 页码: 27-31
Authors:  Xin Rong;  Xinqiang Wang;  Guang Chen;  Jianhai Pan;  Ping Wang;  Huapeng Liu;  Fujun Xu;  Pingheng Tan;  Bo Shen
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