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PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes 期刊论文
SENSORS, 2018, 卷号: 18, 期号: 4, 页码: 1006
Authors:  Yan Su ;   Xin Tong ;   Nan Liu ;   Guowei Han ;   Chaowei Si ;   Jin Ning ;   Zhaofeng Li ;   Fuhua Yang
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Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope 期刊论文
MICROMACHINES, 2018, 卷号: 9, 期号: 2, 页码: 81
Authors:  Jian Yang ;   Chaowei Si ;   Fan Yang ;   Guowei Han ;   Jin Ning ;   Fuhua Yang ;   Xiaodong Wang
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MEMS惯性导航器件的结构级鲁棒性设计 学位论文
, 北京: 中国科学院研究生院, 2014
Authors:  司朝伟
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Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope 期刊论文
SENSORS, 2013, 卷号: 13, 期号: 8, 页码: 10550-10560
Authors:  Chaowei Si, Guowei Han, Jin Ning and Fuhua Yang
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Fabrication and characterization of an SOI MEMS gyroscope 期刊论文
Journal of Semiconductors, 2013, 卷号: 34, 期号: 6, 页码: 064004
Authors:  Zhong Weiwei;  Han Guowei;  Si Chaowei;  Ning Jin;  Yang Fuhua
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Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram 期刊论文
Advanced Materials Research, 2013, 卷号: 677, 页码: 74-78
Authors:  Han, Guowei;  Si, Chaowei;  Ning, Jing;  Zhao, Yongmei;  Sun, Guosheng;  Yang, Fuhua
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Feed-through cancellation of a MEMS filter using the difference method and analysis of the induced notch 期刊论文
Journal of Semiconductors, 2013, 卷号: 34, 期号: 4, 页码: 045006
Authors:  Han, Guowei;  Si, Chaowei;  Ning, Jin;  Zhong, Weiwei;  Sun, Guosheng;  Zhao, Yongmei;  Yang, Fuhua
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Fabrication and characterisation of polysilicon-based clamped-clamped filter 期刊论文
Key Engineering Materials, 2011, 卷号: 483, 页码: 112-116
Authors:  Zhao, Yongmei;  Ning, Jin;  Han, Guowei;  Si, Chaowei;  Zhao, Y.(ymzhao@semi.ac.cn)
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Electromechanical Filters  Fabrication  Microelectromechanical Devices  Nanotechnology  Polysilicon  Resonators  Technology  
采用压电材料制备的阵列结构微机电谐振器 专利
专利类型: 发明, 公开日期: 2013-04-03, 2013-04-03
Inventors:  康中波;  司朝伟;  宁瑾;  韩国威
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基于寄生电容调节的高精度温度补偿MEMS振荡器 专利
专利类型: 发明, 公开日期: 2012-07-18
Inventors:  司朝伟;  韩国威;  宁瑾;  刘晓东
Adobe PDF(414Kb)  |  Favorite  |  View/Download:386/95  |  Submit date:2014/10/31