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Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication 期刊论文
Micromachines, 2019, 卷号: 10, 页码: 420
Authors:  Meng Zhang;  Jian Yang;  Yurong He;  Fan Yang;  Yongmei Zhao;  Fen Xue;  Guowei Han;  Chaowei Si;  Jin Ning
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Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via 期刊论文
Sensors, 2019, 卷号: 19, 页码: 93
Authors:  Meng Zhang;   Jian Yang ;   Yurong He ;   Fan Yang ;   Fuhua Yang ;   Guowei Han ;   Chaowei Si;   Jin Ning
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A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer 期刊论文
Micromachines, 2019, 卷号: 10, 期号: 9, 页码: 589
Authors:  Jian Yang;   Meng Zhang;   Yurong He;   Yan Su ;   Guowei Han ;   Chaowei Si ;   Jin Ning;   Fuhua Yang ;   Xiaodong Wang
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A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope 期刊论文
MICROMACHINES, 2019, 卷号: 10, 页码: 244
Authors:  Jian Yang;   Chaowei Si;   Guowei Han ;   Meng Zhang ;   Jin Ning;   Yongmei Zhao ;   Fuhua Yang;   Xiaodong Wang
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A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer 期刊论文
Journal of Microelectromechanical Systems, 2019, 卷号: 28, 期号: 5, 页码: 776-781
Authors:  Jian Yang;  Meng Zhang;  Chaowei Si;  Guowei Han;  Jin Ning;  Fuhua Yang;  Xiaodong Wang
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PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes 期刊论文
SENSORS, 2018, 卷号: 18, 期号: 4, 页码: 1006
Authors:  Yan Su ;   Xin Tong ;   Nan Liu ;   Guowei Han ;   Chaowei Si ;   Jin Ning ;   Zhaofeng Li ;   Fuhua Yang
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Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope 期刊论文
MICROMACHINES, 2018, 卷号: 9, 期号: 2, 页码: 81
Authors:  Jian Yang ;   Chaowei Si ;   Fan Yang ;   Guowei Han ;   Jin Ning ;   Fuhua Yang ;   Xiaodong Wang
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MEMS惯性导航器件的结构级鲁棒性设计 学位论文
, 北京: 中国科学院研究生院, 2014
Authors:  司朝伟
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Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope 期刊论文
SENSORS, 2013, 卷号: 13, 期号: 8, 页码: 10550-10560
Authors:  Chaowei Si, Guowei Han, Jin Ning and Fuhua Yang
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Fabrication and characterization of an SOI MEMS gyroscope 期刊论文
Journal of Semiconductors, 2013, 卷号: 34, 期号: 6, 页码: 064004
Authors:  Zhong Weiwei;  Han Guowei;  Si Chaowei;  Ning Jin;  Yang Fuhua
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