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| Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication 期刊论文
Micromachines, 2019, 卷号: 10, 页码: 420
Authors: Meng Zhang; Jian Yang; Yurong He; Fan Yang; Yongmei Zhao; Fen Xue; Guowei Han; Chaowei Si; Jin Ning
 Adobe PDF(8646Kb) |  Favorite | View/Download：20/0 | Submit date：2020/08/05 |
| Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via 期刊论文
Sensors, 2019, 卷号: 19, 页码: 93
Authors: Meng Zhang; Jian Yang ; Yurong He ; Fan Yang ; Fuhua Yang ; Guowei Han ; Chaowei Si; Jin Ning
Adobe PDF(3329Kb) | Favorite | View/Download：32/0 | Submit date：2020/08/05 |
| A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer 期刊论文
Micromachines, 2019, 卷号: 10, 期号: 9, 页码: 589
Authors: Jian Yang; Meng Zhang; Yurong He; Yan Su ; Guowei Han ; Chaowei Si ; Jin Ning; Fuhua Yang ; Xiaodong Wang
Adobe PDF(6047Kb) | Favorite | View/Download：28/0 | Submit date：2020/08/05 |
| A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope 期刊论文
MICROMACHINES, 2019, 卷号: 10, 页码: 244
Authors: Jian Yang; Chaowei Si; Guowei Han ; Meng Zhang ; Jin Ning; Yongmei Zhao ; Fuhua Yang; Xiaodong Wang
Adobe PDF(5846Kb) | Favorite | View/Download：91/0 | Submit date：2020/08/05 |
| A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer 期刊论文
Journal of Microelectromechanical Systems, 2019, 卷号: 28, 期号: 5, 页码: 776-781
Authors: Jian Yang; Meng Zhang; Chaowei Si; Guowei Han; Jin Ning; Fuhua Yang; Xiaodong Wang
Adobe PDF(2407Kb) | Favorite | View/Download：34/0 | Submit date：2020/08/05 |
| PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes 期刊论文
SENSORS, 2018, 卷号: 18, 期号: 4, 页码: 1006
Authors: Yan Su ; Xin Tong ; Nan Liu ; Guowei Han ; Chaowei Si ; Jin Ning ; Zhaofeng Li ; Fuhua Yang
Adobe PDF(16980Kb) | Favorite | View/Download：74/0 | Submit date：2019/11/12 |
| Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope 期刊论文
MICROMACHINES, 2018, 卷号: 9, 期号: 2, 页码: 81
Authors: Jian Yang ; Chaowei Si ; Fan Yang ; Guowei Han ; Jin Ning ; Fuhua Yang ; Xiaodong Wang
Adobe PDF(1700Kb) | Favorite | View/Download：86/0 | Submit date：2019/11/12 |
| MEMS惯性导航器件的结构级鲁棒性设计 学位论文
, 北京: 中国科学院研究生院, 2014
Authors: 司朝伟
Adobe PDF(5176Kb) | Favorite | View/Download：849/52 | Submit date：2014/07/16 |
| Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope 期刊论文
SENSORS, 2013, 卷号: 13, 期号: 8, 页码: 10550-10560
Authors: Chaowei Si, Guowei Han, Jin Ning and Fuhua Yang
Adobe PDF(879Kb) | Favorite | View/Download：592/212 | Submit date：2014/04/09 |
| Fabrication and characterization of an SOI MEMS gyroscope 期刊论文
Journal of Semiconductors, 2013, 卷号: 34, 期号: 6, 页码: 064004
Authors: Zhong Weiwei; Han Guowei; Si Chaowei; Ning Jin; Yang Fuhua
Adobe PDF(1921Kb) | Favorite | View/Download：849/120 | Submit date：2014/05/16 |
