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在硅衬底上磁控溅射制备铁磁性锰硅薄膜的方法 专利
专利类型: 发明, 申请日期: 2006-12-27, 公开日期: 2009-06-04, 2009-06-11
Inventors:  刘力锋;  陈诺夫;  尹志岗;  杨霏;  柴春林
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Investigation of Mn-doped Si films prepared by magnetron cosputtering 期刊论文
JOURNAL OF CRYSTAL GROWTH, 2006, 卷号: 291, 期号: 1, 页码: 239-242
Authors:  Liu LF;  Chen NF;  Wang Y;  Yin ZG;  Yang F;  Chai CL;  Zhang X;  Liu, LF, Peking Univ, Inst Microelect, Beijing 100871, Peoples R China. E-mail: lfliu@ime.pku.edu.cn
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Mn Doping  Magnetron Sputtering  Mnxsi1-x  Diluted Magnetic  Thin-films  Spin-photonics  Semiconductors  Growth  Ferromagnetism  Spintronics  
P-doped p-type ZnO films deposited on Si substrate by radio-frequency magnetron sputtering 期刊论文
APPLIED PHYSICS LETTERS, 2006, 卷号: 88, 期号: 15, 页码: Art.No.152102
Authors:  Wang P;  Chen NF;  Yin ZG;  Wang, P, Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China. E-mail: pwang@semi.ac.cn
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Growth and properties of magnetron cosputtering grown Mn(x)Ge(1-x)on Si(001) 期刊论文
SOLID STATE COMMUNICATIONS, 2006, 卷号: 137, 期号: 3, 页码: 126-128
Authors:  Liu LF;  Chen NF;  Wang Y;  Zhang X;  Yin ZG;  Yang F;  Chai CL;  Liu, LF, Peking Univ, Inst Microelect, Novel Devices Grp, Beijing 100871, Peoples R China. E-mail: lfliu@ime.pku.edu.cn
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Magnetron Sputtering  Mnxge1-x  Ferromagnetism  N-type Ge  Ferromagnetism  Semiconductor  Spintronics  
Fabrication and properties of Sb-doped ZnO thin films grown by radio frequency (RF) magnetron sputtering 期刊论文
JOURNAL OF CRYSTAL GROWTH, 2006, 卷号: 290, 期号: 1, 页码: 56-60
Authors:  Wang P;  Chen NF;  Yin ZG;  Yang F;  Peng CT;  Wang, P, Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China. E-mail: pwang@mail.semi.ac.cn
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Crystal Structure  Thermal Annealing  X-ray Diffraction  Rf Magnetron Sputtering  Zinc Oxide  Semiconducting Ii-vi Materials  P-type Zno  Spray-pyrolysis  Zinc-oxide