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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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中国科学院半导体研究... [2]
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1993 [1]
1991 [1]
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中文 [2]
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中国激光 [1]
半导体学报 [1]
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单片集成式反应离子刻蚀沟槽耦合腔AlGaAs/GaAs激光器
期刊论文
中国激光, 1993, 卷号: 20, 期号: 3, 页码: 161
Authors:
张石桥
;
谭叔明
;
庄婉如
;
杨培生
;
陈季英
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Submit date：2010/11/23
采用CH4/H2混合气对InP进行反应离子腐蚀的研究
期刊论文
半导体学报, 1991, 卷号: 12, 期号: 4, 页码: 231
Authors:
李建中
;
陈纪瑛
Adobe PDF(212Kb)
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View/Download：1028/241
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Submit date：2010/11/23
