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题名: Micro-fabricated Al0.3Ga0.7As pyramids for potential SPM applications
作者: Sun, J;  Hu, LZ;  Sun, YC;  Wang, ZY
出版日期: 2004
会议日期: SEP 20-25, 2004
摘要: A novel technique of manufacturing Al0.3Ga0.7As pyramids by liquid phase epitaxy (LPE) for scanning probe microscopy (SPM) sensors is reported Four meticulously designed conditions-partial oxidation, deficient solute, air quenching and germanium doping result in defect-free homogeneous nucleation and subsequent pyramid formation. Micrometer-sized frustums and pyramids are detected by scanning electron microscopy (SEM). The sharp end of the microtip has a radius of curvature smaller than 50 nm. It is believed that such accomplishments would contribute not only to crystal growth theory, but also to miniature fabrication technology.
会议名称: 13th International Conference on Semiconducting and Insulating Materials (SIMC XIII)
KOS主题词: Development
会议文集: SMIC-XIII 2004 13th International Conference on Semiconducting & Insulating Materials
专题: 中国科学院半导体研究所(2009年前)_会议论文

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推荐引用方式:
Sun, J; Hu, LZ; Sun, YC; Wang, ZY .Micro-fabricated Al0.3Ga0.7As pyramids for potential SPM applications .见:IEEE .SMIC-XIII 2004 13th International Conference on Semiconducting & Insulating Materials,345 E 47TH ST, NEW YORK, NY 10017 USA ,2004,172-175
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