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题名: Synthesis of GaN nanorods with vertebra-like morphology
作者: Gao, HY (Gao, Haiyong);  Li, JM (Li, Jinmin)
出版日期: 2006
会议日期: JAN 18-21, 2006
摘要: GaN nanorods with vertebra-like morphology were synthesized by nitriding Ga2O3/ZnO films at 1000 degrees C for 20min. Ga2O3 thin films and ZnO middle layers were pre-deposited in turn on Si(111) substrates by r.f. magnetron sputtering system. In the flowing ammonia ambient, ZnO was reducted to Zn and Zu sublimated at 1000 degrees C. Ga2O3 was reducted to Ga2O and Ga2O reacted with NH3 to synthesize GaN nanorods in the help of the sublimation of Zn. The structure and morphology of the nanorods were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM), The composition of GaN nanorods was studied by energy dispersive spectroscopy (EDS) and fourier transform infrared (FTIR) system.
会议名称: IEEE International Conference of Nano/Micro Engineered and Molecular Systems
KOS主题词: Anatomy;  Chemical vapor deposition;  atomic layer deposition;  Vapor-plating;  Photography--Films;  Finite volume method
会议文集: 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems
专题: 中国科学院半导体研究所(2009年前)_会议论文

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推荐引用方式:
Gao, HY (Gao, Haiyong); Li, JM (Li, Jinmin) .Synthesis of GaN nanorods with vertebra-like morphology .见:IEEE .2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems,345 E 47TH ST, NEW YORK, NY 10017 USA ,2006,Vols 1-3: 196-199
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