SOI optical switch matrix integrated with spot size converter (SSC) and total internal reflection (TIR) mirrors

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	SOI optical switch matrix integrated with spot size converter (SSC) and total internal reflection (TIR) mirrors
	Yu JZ (Yu Jinzhong); Chen SW (Chen Shaowu); Li ZY (Li Zhiyong); Chen YY (Chen Yuanyuan); Li YT (Li Yuntao); Li YP (Li Yanping); Liu JW (Liu Jingwei); Yang D (Yang Di); Yu, JZ, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, POB 912, Beijing 100083, Peoples R China.
	2006
会议名称	3rd International Conference on Group IV Photonics
会议录名称	2006 3rd IEEE International Conference on Group IV Photonics
页码	119-121
会议日期	SEP 13-15, 2006
会议地点	Ottawa, CANADA
出版地	345 E 47TH ST, NEW YORK, NY 10017 USA
出版者	IEEE
ISBN	978-1-4244-0095-9
部门归属	chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
摘要	SOI (Silicon on Insulator) based photonic devices has attracted more and more attention in the recent years. Integration of SOI optical switch matrix with isolating grooves, total internal reflection (TIR) mirrors and spot size converter (SSC) was studied. A folding re-arrangeable non-blocking 4x4 optical switch matrix and a blocking 16x16 matrix with TIR mirrors and SSC were fabricated on SOI wafer. The performaces, including extinction ratio and the crosstalk, are better than before. The insertion loss and the polarization dependent loss (PDL) at 1.55 mu m increase slightly with longer device length, more bend and intersecting waveguides. The insertion losses decrease 2 similar to 3 dB when anti-reflection films are added in the ends of the devices. The rise and fall times of the devices are 2.1 mu s and 2.3 mu s, respectively.
关键词	Soi
学科领域	光电子学
主办者	IEEE.
收录类别	其他
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/9778
专题	中国科学院半导体研究所（2009年前）
通讯作者	Yu, JZ, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, POB 912, Beijing 100083, Peoples R China.
推荐引用方式 GB/T 7714	Yu JZ ,Chen SW ,Li ZY ,et al. SOI optical switch matrix integrated with spot size converter (SSC) and total internal reflection (TIR) mirrors[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2006:119-121.

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