SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
Multi channel micro neural probe fabricated with SOI
Wang SJ (Wang Shujing); Pei WH (Pei Weihua); Guo K (Guo Kai); Gui Q (Gui Qiang); Wang Y (Wang Yu); Zhang X (Zhang Xu); Tang J (Tang Jun); Chen HD (Chen Hongda); Pei, WH, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
2009
Conference NameICME International Conference on Complex Medical Engineering
Source Publication2009 ICME INTERNATIONAL CONFERENCE ON COMPLEX MEDICAL ENGINEERING
Pages161-164
Conference DateAPR 09-11, 2009
Conference PlaceTempe, AZ
Publication Place345 E 47TH ST, NEW YORK, NY 10017 USA
PublisherIEEE
ISBN978-1-4244-3315-5
metadata_83[wang, shujing; pei, weihua; guo, kai; gui, qiang; wang, yu; zhang, xu; tang, jun; chen, hongda] chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
AbstractExtracellular neural recording requires neural probes having more recording sites as well as limited volumes. With its mechanical characteristic and abundant process method, Silicon is a kind of material fit for producing neural probe. Silicon on insulator (SOI) is adopted in this paper to fabricate neural probes. The uniformity and manufacturability are improved. The fabricating process and testing results of a series of Multi channel micro neural probes were reported. The thickness of the probe is 15 mu m-30 mu m. The typical impedance characteristics of the record sites are around 2M Omega at 1k Hz. The performance of the neural probe in-vivo was tested on anesthetic rat. The recorded neural spike was typically around 140 mu V. Spike recorded from individual site could exceed 700 mu V. The average signal noise ratio was 7 or more.
KeywordMicroelectrode Arrays
Subject Area人工智能
Funding OrganizationICME.
Indexed By其他
Language英语
Document Type会议论文
Identifierhttp://ir.semi.ac.cn/handle/172111/8364
Collection中国科学院半导体研究所(2009年前)
Corresponding AuthorPei, WH, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
Recommended Citation
GB/T 7714
Wang SJ ,Pei WH ,Guo K ,et al. Multi channel micro neural probe fabricated with SOI[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2009:161-164.
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