Multi channel micro neural probe fabricated with SOI

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Multi channel micro neural probe fabricated with SOI
	Wang SJ (Wang Shujing); Pei WH (Pei Weihua); Guo K (Guo Kai); Gui Q (Gui Qiang); Wang Y (Wang Yu); Zhang X (Zhang Xu); Tang J (Tang Jun); Chen HD (Chen Hongda); Pei, WH, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
	2009
会议名称	ICME International Conference on Complex Medical Engineering
会议录名称	2009 ICME INTERNATIONAL CONFERENCE ON COMPLEX MEDICAL ENGINEERING
页码	161-164
会议日期	APR 09-11, 2009
会议地点	Tempe, AZ
出版地	345 E 47TH ST, NEW YORK, NY 10017 USA
出版者	IEEE
ISBN	978-1-4244-3315-5
部门归属	[wang, shujing; pei, weihua; guo, kai; gui, qiang; wang, yu; zhang, xu; tang, jun; chen, hongda] chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
摘要	Extracellular neural recording requires neural probes having more recording sites as well as limited volumes. With its mechanical characteristic and abundant process method, Silicon is a kind of material fit for producing neural probe. Silicon on insulator (SOI) is adopted in this paper to fabricate neural probes. The uniformity and manufacturability are improved. The fabricating process and testing results of a series of Multi channel micro neural probes were reported. The thickness of the probe is 15 mu m-30 mu m. The typical impedance characteristics of the record sites are around 2M Omega at 1k Hz. The performance of the neural probe in-vivo was tested on anesthetic rat. The recorded neural spike was typically around 140 mu V. Spike recorded from individual site could exceed 700 mu V. The average signal noise ratio was 7 or more.
关键词	Microelectrode Arrays
学科领域	人工智能
主办者	ICME.
收录类别	其他
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/8364
专题	中国科学院半导体研究所（2009年前）
通讯作者	Pei, WH, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
推荐引用方式 GB/T 7714	Wang SJ ,Pei WH ,Guo K ,et al. Multi channel micro neural probe fabricated with SOI[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2009:161-164.

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