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题名: Multi channel micro neural probe fabricated with SOI
作者: Wang SJ (Wang Shujing);  Pei WH (Pei Weihua);  Guo K (Guo Kai);  Gui Q (Gui Qiang);  Wang Y (Wang Yu);  Zhang X (Zhang Xu);  Tang J (Tang Jun);  Chen HD (Chen Hongda)
出版日期: 2009
会议日期: APR 09-11, 2009
摘要: Extracellular neural recording requires neural probes having more recording sites as well as limited volumes. With its mechanical characteristic and abundant process method, Silicon is a kind of material fit for producing neural probe. Silicon on insulator (SOI) is adopted in this paper to fabricate neural probes. The uniformity and manufacturability are improved. The fabricating process and testing results of a series of Multi channel micro neural probes were reported. The thickness of the probe is 15 mu m-30 mu m. The typical impedance characteristics of the record sites are around 2M Omega at 1k Hz. The performance of the neural probe in-vivo was tested on anesthetic rat. The recorded neural spike was typically around 140 mu V. Spike recorded from individual site could exceed 700 mu V. The average signal noise ratio was 7 or more.
会议名称: ICME International Conference on Complex Medical Engineering
会议文集: 2009 ICME INTERNATIONAL CONFERENCE ON COMPLEX MEDICAL ENGINEERING
专题: 中国科学院半导体研究所(2009年前)_会议论文

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推荐引用方式:
Wang, SJ (Wang, Shujing); Pei, WH (Pei, Weihua); Guo, K (Guo, Kai); Gui, Q (Gui, Qiang); Wang, Y (Wang, Yu); Zhang, X (Zhang, Xu); Tang, J (Tang, Jun); Chen, HD (Chen, Hongda) .Multi channel micro neural probe fabricated with SOI .见:IEEE .2009 ICME INTERNATIONAL CONFERENCE ON COMPLEX MEDICAL ENGINEERING,345 E 47TH ST, NEW YORK, NY 10017 USA ,2009,161-164
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