Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab
	Yu HJ; Yu JZ; Yu YD; Chen SW; Yu, HJ, Beijing Univ Posts & Telecommun, Minist Educ, Key Lab Opt Commun & Lightwave Technol, Beijing 100876, Peoples R China.
会议名称	6th International Conference on Nanoscience and Technology
会议录名称	JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
页码	9 (2): 974-977 Sp. Iss. SI FEB
会议日期	JUN 04-06, 2007
会议地点	Beijing, PEOPLES R CHINA
出版地	25650 NORTH LEWIS WAY, STEVENSON RANCH, CA 91381-1439 USA
出版者	AMER SCIENTIFIC PUBLISHERS
ISSN	1533-4880
部门归属	[yu, hejun] beijing univ posts & telecommun, minist educ, key lab opt commun & lightwave technol, beijing 100876, peoples r china; [yu, hejun; yu, jinzhong; yu, yude; chen, shaowu] chinese acad sci, state key lab integrated optoelect, inst semicond, beijing 100083, peoples r china
摘要	We report on the design and fabrication of a photonic crystal (PC) channel drop filter based on an asymmetric silicon-on-insulator (SOI) slab. The filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (W1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. A sample is then fabricated by using electron beam lithography (EBL) and inductively coupled plasma (ICP) etching processes. The measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum.
关键词	Photonic Crystal (Pc)
学科领域	半导体化学
主办者	Natl Steering Comm Nanotechnol.; Natl Ctr Nanosci Technol.; Minist Sci & Technol China.; Natl Nat Sci Fdn China.; Minist Educ China.; Chinese Acad Sci.; China Assoc Sci & Technol.
收录类别	其他
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/8328
专题	中国科学院半导体研究所（2009年前）
通讯作者	Yu, HJ, Beijing Univ Posts & Telecommun, Minist Educ, Key Lab Opt Commun & Lightwave Technol, Beijing 100876, Peoples R China.
推荐引用方式 GB/T 7714	Yu HJ,Yu JZ,Yu YD,et al. Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab[C]. 25650 NORTH LEWIS WAY, STEVENSON RANCH, CA 91381-1439 USA:AMER SCIENTIFIC PUBLISHERS:9 (2): 974-977 Sp. Iss. SI FEB.

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