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题名: Accurate vibration detection of a rough surface - art. no. 683118
作者: Zeng, HL;  Zhou, Y;  Fan, ST;  He, J
出版日期: 2008
会议日期: NOV 12-14, 2007
摘要: Based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2Mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. Suggestions were also given to consummate the system. The system also has resistance against the low frequency disturbance of the environment.
会议名称: 2nd Conference on Nanophotonics, Nanostructure and Nanometrology
KOS主题词: Nanometrology;  Interferometry
会议文集: NANOPHOTONICS,NANOSTRUCTURE,AND NANOMETROLOGY II
专题: 中国科学院半导体研究所(2009年前)_会议论文

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推荐引用方式:
Zeng, HL ; Zhou, Y ; Fan, ST ; He, J .Accurate vibration detection of a rough surface - art. no. 683118 .见:SPIE-INT SOC OPTICAL ENGINEERING .NANOPHOTONICS,NANOSTRUCTURE,AND NANOMETROLOGY II,1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA ,2008,6831: 83118-83118
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