Knowledge Management System Of Institute of Semiconductors,CAS
Low Temperature Deposited Nano-structured Vanadium Oxide Thin Films for Uncooled Infrared Detectors | |
Li GK![]() ![]() | |
2008 | |
Conference Name | 2nd IEEE International Nanoelectronics Conference |
Source Publication | 2008 2ND IEEE INTERNATIONAL NANOELECTRONICS CONFERENCE |
Pages | VOLS 1-3: 921-923 |
Conference Date | MAR 24-27, 2008 |
Conference Place | Shanghai, PEOPLES R CHINA |
Publication Place | 345 E 47TH ST, NEW YORK, NY 10017 USA |
Publisher | IEEE |
ISBN | 978-1-4244-1572-4 |
metadata_83 | [li, guike; liu, jian; wu, nanjian] chinese acad sci, inst semicond, natl lab superlattices & microstruct, beijing 100083, peoples r china |
Abstract | A novel process of room temperature ion beam sputtering deposition of vanadium oxide films and low temperature post annealing for uncooled infrared detectors was proposed in this work. VOx thin films with relatively low square resistance (70 K Omega / square) and large temperature coefficient of resistance (more than 3%/K) at room temperature were fabricated using this low temperature process which was very compatible with the process of uncooled infrared detectors based on micromachined technology. Furthermore, chemical composition and film surface have been characterized using X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) respectively. The results showed that the main composition of the processed thin films was V2O5 and the thin films were in the process of crystallization. |
Subject Area | 微电子学 |
Funding Organization | IEEE. |
Indexed By | 其他 |
Language | 英语 |
Document Type | 会议论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/7756 |
Collection | 中国科学院半导体研究所(2009年前) |
Corresponding Author | Li, GK, Chinese Acad Sci, Inst Semicond, Natl Lab Superlattices & Microstruct, Beijing 100083, Peoples R China. |
Recommended Citation GB/T 7714 | Li GK,Wang XD,Liang JR,et al. Low Temperature Deposited Nano-structured Vanadium Oxide Thin Films for Uncooled Infrared Detectors[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2008:VOLS 1-3: 921-923. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
650.pdf(803KB) | 限制开放 | -- | Application Full Text |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment