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title: 在Si衬底上生长ZnO薄膜的方法
author: 崔军朋;  段垚;  王晓峰;  曾一平
metadata_47: 2009-3-18
Appears in Collections:半导体研究所机构知识库_专利

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崔军朋;段垚;王晓峰;曾一平,在Si衬底上生长ZnO薄膜的方法 ,CN200710121659.2,20070912
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