SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
硅V形槽板及利用硅V形槽板装配微丝电极阵列的方法
陈弘达; 张若昕; 裴为华; 隋小红
2008-01-30
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2006-07-27
Language中文
Application Number200610088945
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3949
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
陈弘达,张若昕,裴为华,等. 硅V形槽板及利用硅V形槽板装配微丝电极阵列的方法[P]. 2008-01-30.
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