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title: 半导体应变弛豫材料的制作方法
author: 成步文;  姚飞;  薛春来;  张建国;  左玉华;  王启明
metadata_47: 2008-1-2
Appears in Collections:半导体研究所机构知识库_专利

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成步文;姚飞;薛春来;张建国;左玉华;王启明,半导体应变弛豫材料的制作方法 ,200610089447,20060628
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