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title: 用磁控溅射法在镓砷衬底上外延生长铟砷锑薄膜的方法
author: 彭长涛;  陈诺夫;  吴金良;  尹志冈;  杨霏
metadata_47: 2006-11-22
Appears in Collections:半导体研究所机构知识库_专利

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彭长涛;陈诺夫;吴金良;尹志冈;杨霏,用磁控溅射法在镓砷衬底上外延生长铟砷锑薄膜的方法,200510011741,20050519
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