SEMI OpenIR  > 全固态光源实验室
碳化硅晶圆激光剥离机理与工艺研究
姜璐
Subtype硕士
2023
Degree Grantor中国科学院大学
Place of Conferral中国科学院半导体研究所
Language中文
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/31691
Collection全固态光源实验室
Recommended Citation
GB/T 7714
姜璐. 碳化硅晶圆激光剥离机理与工艺研究[D]. 中国科学院半导体研究所. 中国科学院大学,2023.
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GK2023133-硕士-全固态-姜璐-(5269KB)学位论文 限制开放CC BY-NC-SAApplication Full Text
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