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title: 无破坏性检测高电子迁移率晶体管外延材料性能的方法
author: 崔利杰;  曾一平;  王保强;  朱战平
metadata_47: 2004-10-6
Appears in Collections:半导体研究所机构知识库_专利

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Recommended Citation:
崔利杰;曾一平;王保强;朱战平,无破坏性检测高电子迁移率晶体管外延材料性能的方法 ,CN03107705.6,20030402
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