SEMI OpenIR  > 半导体集成技术工程研究中心
可级联椭圆结构AlN BAW谐振器研究
杨帆
Subtype博士
2019-06
Degree Grantor中国科学院大学
Place of Conferral中国科学院半导体研究所
Language中文
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/28936
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
杨帆. 可级联椭圆结构AlN BAW谐振器研究[D]. 中国科学院半导体研究所. 中国科学院大学,2019.
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2019084-杨帆-博士-可级联椭圆结(4558KB)学位论文 限制开放CC BY-NC-SAApplication Full Text
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