SEMI OpenIR  > 光电子研究发展中心
近红外雪崩光电探测阵列研究
侯丽丽
Subtype硕士
Thesis Advisor韩勤
2018-05-25
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline微电子学与固体电子学
Keyword雪崩光电二极管 盖革模式 刻蚀坑 阵列 均匀性
Subject Area半导体器件 ; 光电子学 ; 微电子学
Date Available2018-05-25
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/28353
Collection光电子研究发展中心
Recommended Citation
GB/T 7714
侯丽丽. 近红外雪崩光电探测阵列研究[D]. 北京. 中国科学院研究生院,2018.
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