SEMI OpenIR  > 半导体集成技术工程研究中心
GaAs/Si低温直接键合技术研究
刘雨生
Subtype硕士
Thesis Advisor王晓东
2017-05-27
Degree Grantor中国科学院大学
Place of Conferral北京
Degree Discipline集成电路工程
KeywordGaas/si 直接键合 低温 等离子体活化
Subject Area半导体材料 ; 半导体器件
Date Available2017-06-01
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/28173
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
刘雨生. GaAs/Si低温直接键合技术研究[D]. 北京. 中国科学院大学,2017.
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