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硅基水平III-V族纳米线晶体管的研究
张望
Subtype硕士
Thesis Advisor韩伟华
2017-05-27
Degree Grantor中国科学院大学
Place of Conferral北京
Degree Discipline微电子学与固体电子学
Keyword纳米线晶体管 Soi图形衬底 水平iii-v族纳米线 界面态 变温电学特性
Subject Area半导体器件
Date Available2017-06-01
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/28169
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
张望. 硅基水平III-V族纳米线晶体管的研究[D]. 北京. 中国科学院大学,2017.
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