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title: 与CMOS工艺兼容的硅光电探测器及制作方法
author: 毛陆虹;  李伟;  陈弘达;  高鹏;  孙增辉;  陈永权
metadata_47: 2005-4-20
Appears in Collections:半导体研究所机构知识库_专利

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毛陆虹;李伟;陈弘达;高鹏;孙增辉;陈永权,与CMOS工艺兼容的硅光电探测器及制作方法 ,CN200310101069.5,20031014
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