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一种用于激光器无遮挡镀膜的镀膜架装置
赵懿昊; 王翠鸾; 刘素平; 马骁宇
Rights Holder中国科学院半导体所
Date Available2016-09-12
Country中国
Subtype发明
Subject Area半导体器件
Application Date2014-06-17
Application NumberCN201410270114.8
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27399
Collection光电子器件国家工程中心
Recommended Citation
GB/T 7714
赵懿昊,王翠鸾,刘素平,等. 一种用于激光器无遮挡镀膜的镀膜架装置.
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