SEMI OpenIR  > 中科院半导体材料科学重点实验室
一种微区荧光扫描测量系统
秦旭东; 张宏毅; 叶小玲; 陈涌海
Rights Holder中国科学院半导体所
Date Available2016-08-30
Country中国
Subtype发明
Subject Area半导体材料
Application Date2014-12-02
Application NumberCN201410720085.0
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27264
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
秦旭东,张宏毅,叶小玲,等. 一种微区荧光扫描测量系统.
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一种微区荧光扫描测量系统.pdf(657KB) 限制开放LicenseApplication Full Text
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