SEMI OpenIR  > 半导体集成技术工程研究中心
新型阵列级联耦合结构AlN谐振器的研制
张萌
Subtype硕士
Thesis Advisor宁瑾
2016-05-22
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline微电子学与固体电子学
Date Available2016-05-26
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/27060
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
张萌. 新型阵列级联耦合结构AlN谐振器的研制[D]. 北京. 中国科学院研究生院,2016.
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