SEMI OpenIR  > 中科院半导体材料科学重点实验室
GaSb单晶衬底表面形貌及残留缺陷研究
程雨
Subtype硕士
Thesis Advisor赵有文
2015-05-27
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline材料工程
Keyword锑化镓(gasb) 化学机械抛光 二次离子质谱(sims) Xps 表面形貌
Subject Area半导体材料
Date Available2015-05-29
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26501
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
程雨. GaSb单晶衬底表面形貌及残留缺陷研究[D]. 北京. 中国科学院研究生院,2015.
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