SEMI OpenIR  > 中科院半导体材料科学重点实验室
材料的微区应力测试系统
高寒松; 陈涌海; 刘雨; 张宏毅; 黄威; 朱来攀; 李远; 邬庆
Rights Holder中国科学院半导体研究所
Date Available2014-07-23
Country中国
Subtype发明
Subject Area半导体材料
Application Date2014-04-10
Application NumberCN201410143013.4
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25723
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
高寒松,陈涌海,刘雨,等. 材料的微区应力测试系统.
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材料的微区应力测试系统.pdf(513KB) 限制开放LicenseApplication Full Text
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