SEMI OpenIR  > 纳米光电子实验室
具有宽度周期性渐变表面的全息光栅制备方法
宋国峰; 王立娜; 胡海峰; 张晶; 徐云; 刘运涛
Rights Holder中国科学院半导体研究所
Date Available2013-07-31
Country中国
Subtype发明
Subject Area半导体材料
Application Date2013-04-19
Application NumberCN201310136826.6
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25655
Collection纳米光电子实验室
Recommended Citation
GB/T 7714
宋国峰,王立娜,胡海峰,等. 具有宽度周期性渐变表面的全息光栅制备方法.
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