SEMI OpenIR  > 中科院半导体材料科学重点实验室
一种响应度可调的硅光电探测器及其制作方法
黄永光; 朱洪亮
Rights Holder中国科学院半导体研究所
Date Available2013-10-23
Country中国
Subtype发明
Subject Area半导体材料
Application Date2013-07-05
Application NumberCN201310280622.X
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25611
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
黄永光,朱洪亮. 一种响应度可调的硅光电探测器及其制作方法.
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