SEMI OpenIR  > 中科院半导体材料科学重点实验室
激光器阵列与合波器单片集成芯片的制作方法
梁松; 朱洪亮; 王圩
Rights Holder中国科学院半导体研究所
Date Available2014-01-29
Country中国
Subtype发明
Subject Area半导体材料
Application Date2013-10-23
Application NumberCN201310503604.3
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25497
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
梁松,朱洪亮,王圩. 激光器阵列与合波器单片集成芯片的制作方法.
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