SEMI OpenIR  > 中科院半导体材料科学重点实验室
一种用于电子束蒸发的半导体外延片夹具
梁平; 胡颖; 刘俊岐; 刘峰奇; 王利军; 张锦川
Rights Holder中国科学院半导体研究所
Date Available2012-10-17
Country中国
Subtype发明
Subject Area半导体材料
Application Date2012-06-21
Application NumberCN201210211614.5
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25307
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
梁平,胡颖,刘俊岐,等. 一种用于电子束蒸发的半导体外延片夹具.
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