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基于CCD视觉的激光头高度调节装置及调节方法
赵伟芳; 林学春; 于海娟; 李晋闽
Rights Holder中国科学院半导体研究所
Date Available2013-03-13 ; 2013-03-13
Country中国
Subtype发明
Subject Area半导体器件
Application Date2012-11-12
Application NumberCN201210449521.6
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25160
Collection全固态光源实验室
Recommended Citation
GB/T 7714
赵伟芳,林学春,于海娟,等. 基于CCD视觉的激光头高度调节装置及调节方法.
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