SEMI OpenIR  > 半导体材料科学中心
多晶硅碱性制绒方法; 多晶硅碱性制绒方法
陈腾; 赵有文
Rights Holder中国科学院半导体研究所
Date Available2012-08-29 ; 2012-08-29 ; 2012-08-29
Country中国
Subtype发明
Abstract 一种多晶硅碱性制绒方法,包括以下步骤:1)配制碱性制绒液;2)将配制好的制绒液加热,然后取一片多晶硅浸泡于制绒液中,进行制绒;3)对制绒后的多晶硅片漂洗;4)漂洗后酸洗,再进行二次漂洗;5)将二次漂洗后的多晶硅片甩干,完成多晶硅碱性制绒的步骤。
metadata_83半导体材料科学中心
Application Date2011-12-07
Patent NumberCN102437044A
Language中文
Status公开
Application Number CN201110404087.5
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/23310
Collection半导体材料科学中心
Recommended Citation
GB/T 7714
陈腾,赵有文. 多晶硅碱性制绒方法, 多晶硅碱性制绒方法. CN102437044A.
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