SEMI OpenIR  > 半导体材料科学中心
AlxGa1-xN材料生长及MSM型紫外探测器制备研究
潘旭
Subtype博士
Thesis Advisor王晓亮 ; 肖红领
2012
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline微电子学与固体电子学
KeywordAlxga1-xn三元合金 高al组分 紫外探测器 金属有机物化学气相外延 Si基gan
Subject Area半导体物理 ; 半导体材料 ; 半导体器件
Date Available2012-06-05
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/22940
Collection半导体材料科学中心
Recommended Citation
GB/T 7714
潘旭. AlxGa1-xN材料生长及MSM型紫外探测器制备研究[D]. 北京. 中国科学院研究生院,2012.
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