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对砷化镓太阳电池帽层进行选择性腐蚀的化学腐蚀液
刘雯; 李越强; 王晓东; 陈燕凌; 杨富华
Rights Holder中国科学院半导体研究所
Date Available2011-08-31
Country中国
Subtype发明
Abstract本发明公开了一种对砷化镓太阳电池帽层进行选择性腐蚀的化学腐蚀液,该化学腐蚀液的配比为1g固体柠檬酸与3~4ml的双氧水,实现了对Al组分为0.8~0.9的砷化镓太阳电池帽层Al0.8~0.9GaAs/GaAs的选择性腐蚀。本发明提供的这种对砷化镓太阳电池帽层进行选择性腐蚀的化学腐蚀液,具有高的选择性腐蚀,能够实现GaAs太阳电池帽层选择腐蚀的目的,并且腐蚀液配制方便,具有很好的重复性。
metadata_83半导体集成技术工程研究中心
Patent NumberCN200910237097.7
Language中文
Status公开
Application NumberCN200910237097.7
Patent Agent周国城
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/22379
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
刘雯,李越强,王晓东,等. 对砷化镓太阳电池帽层进行选择性腐蚀的化学腐蚀液. CN200910237097.7.
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