Photoluminescence of nanocrystalline SiC films prepared by rf magnetron sputtering

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Photoluminescence of nanocrystalline SiC films prepared by rf magnetron sputtering
	Liu JW; Xie FQ; Zhong DY; Wang EG; Liu WX; Li SF; Yang H; Liu JW Chinese Acad Sci Inst Phys State Key Lab Surface Phys POB 603 Beijing 100080 Peoples R China.
	2001
会议名称	Chinese-German Workshop on Characterization and Development on Nanosystems
会议录名称	CHINESE PHYSICS, 10
页码	S36-S39
会议日期	OCT 30-NOV 02, 2000
会议地点	BEIJING, PEOPLES R CHINA
出版地	P O BOX 603, BEIJING 100080, PEOPLES R CHINA
出版者	CHINESE PHYSICAL SOC
ISSN	1009-1963
部门归属	chinese acad sci, inst phys, state key lab surface phys, beijing 100080, peoples r china; tianjin univ, sch mat sci & engn, tianjin 300072, peoples r china; chinese acad sci, inst semicond, natl res ctr optoelect technol, beijing 100083, peoples r china
摘要	Amorphous Sic films are deposited on Si (111) substrates by rf magnetron sputtering and then annealed at 1200 degreesC for different times by a dc self-heating method in a vacuum annealing system. The crystallization of the amorphous Sic is determined by Raman scattering at room temperature and X-ray diffraction. The experimental result indicates that the Sic nanocrystals have formed in the films. The topography of the as-annealed films is characterized by atomic force microscopy. Measurements of photoluminescence of the as-annealed films show blue or violet light emission from the nanocrystalline Sic films and photoluminescence peak shifts to short wavelength side as the annealing time decreases.
关键词	Luminescence Sic Nanocrystalline Film Rf Sputtering Raman-scattering
学科领域	半导体材料
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/14925
专题	中国科学院半导体研究所（2009年前）
通讯作者	Liu JW Chinese Acad Sci Inst Phys State Key Lab Surface Phys POB 603 Beijing 100080 Peoples R China.
推荐引用方式 GB/T 7714	Liu JW,Xie FQ,Zhong DY,et al. Photoluminescence of nanocrystalline SiC films prepared by rf magnetron sputtering[C]. P O BOX 603, BEIJING 100080, PEOPLES R CHINA:CHINESE PHYSICAL SOC,2001:S36-S39.