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| Thermodynamic analysis of GaSb-GaCl3 vapor phase epitaxy | |
| Lu DC; Lin LY; Lu DC Chinese Acad Sci Inst Semicond Lab Semicond Mat Sci Beijing 100083 Peoples R China. | |
| 2001 | |
| 会议名称 | 1st International Symposium on Microgravity Research and Applications in Physical Sciences and Biotechnology |
| 会议录名称 | FIRST INTERNATIONAL SYMPOSIUM ON MICROGRAVITY RESEARCH & APPLICATIONS IN PHYSICAL SCIENCES AND BIOTECHNOLOGY, VOLS I AND II, PROCEEDINGS, 454 |
| 页码 | 425-430 |
| 会议日期 | SEP 10-15, 2000 |
| 会议地点 | SORRENTO, ITALY |
| 出版地 | 8-10 RUE MARIO NIKIS, 75738 PARIS, FRANCE |
| 出版者 | EUROPEAN SPACE AGENCY |
| ISSN | 0379-6566 |
| ISBN | 92-9092-657-0 |
| 部门归属 | chinese acad sci, inst semicond, lab semicond mat sci, beijing 100083, peoples r china |
| 摘要 | A thermodynamic model for the GaSb-GaCl3 system in a closed quartz ampoule was proposed. The species in the gas phase are GaCl, GaCl3, Sb-4, Sb-2. The partial pressures of these species and total pressure in the ampoule have been calculated. The calculated results indicate that the equilibrium partial pressures of GaCl, GaCl3, Sb4, Sb2 and the total pressure in the ampoule have strong dependence on temperature, free volume inside the closed ampoule and amount of transport agent GaCl3. The total pressure will give strong influence not only on the flow pattern in the ampoule, but also on the uniformity of the epilayer. |
| 关键词 | Transport |
| 学科领域 | 半导体材料 |
| 主办者 | European Space Agcy.; Seconda Univ Napoli.; ASI.; CNES.; CSA.; DLR.; NASA.; NASDA. |
| 收录类别 | CPCI-S |
| 语种 | 英语 |
| 文献类型 | 会议论文 |
| 条目标识符 | http://ir.semi.ac.cn/handle/172111/13737 |
| 专题 | 中国科学院半导体研究所（2009年前） |
| 通讯作者 | Lu DC Chinese Acad Sci Inst Semicond Lab Semicond Mat Sci Beijing 100083 Peoples R China. |
| 推荐引用方式 GB/T 7714 | Lu DC,Lin LY,Lu DC Chinese Acad Sci Inst Semicond Lab Semicond Mat Sci Beijing 100083 Peoples R China.. Thermodynamic analysis of GaSb-GaCl3 vapor phase epitaxy[C]. 8-10 RUE MARIO NIKIS, 75738 PARIS, FRANCE:EUROPEAN SPACE AGENCY,2001:425-430. |
| 条目包含的文件 | ||||||
| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| 2897.pdf（224KB） | 限制开放 | -- | 请求全文 | |||
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