Thermodynamic analysis of GaSb-GaCl3 vapor phase epitaxy
Lu DC; Lin LY; Lu DC Chinese Acad Sci Inst Semicond Lab Semicond Mat Sci Beijing 100083 Peoples R China.
2001
会议名称1st International Symposium on Microgravity Research and Applications in Physical Sciences and Biotechnology
会议录名称FIRST INTERNATIONAL SYMPOSIUM ON MICROGRAVITY RESEARCH & APPLICATIONS IN PHYSICAL SCIENCES AND BIOTECHNOLOGY, VOLS I AND II, PROCEEDINGS, 454
页码425-430
会议日期SEP 10-15, 2000
会议地点SORRENTO, ITALY
出版地8-10 RUE MARIO NIKIS, 75738 PARIS, FRANCE
出版者EUROPEAN SPACE AGENCY
ISSN0379-6566
ISBN92-9092-657-0
部门归属chinese acad sci, inst semicond, lab semicond mat sci, beijing 100083, peoples r china
摘要A thermodynamic model for the GaSb-GaCl3 system in a closed quartz ampoule was proposed. The species in the gas phase are GaCl, GaCl3, Sb-4, Sb-2. The partial pressures of these species and total pressure in the ampoule have been calculated. The calculated results indicate that the equilibrium partial pressures of GaCl, GaCl3, Sb4, Sb2 and the total pressure in the ampoule have strong dependence on temperature, free volume inside the closed ampoule and amount of transport agent GaCl3. The total pressure will give strong influence not only on the flow pattern in the ampoule, but also on the uniformity of the epilayer.
关键词Transport
学科领域半导体材料
主办者European Space Agcy.; Seconda Univ Napoli.; ASI.; CNES.; CSA.; DLR.; NASA.; NASDA.
收录类别CPCI-S
语种英语
文献类型会议论文
条目标识符http://ir.semi.ac.cn/handle/172111/13737
专题中国科学院半导体研究所(2009年前)
通讯作者Lu DC Chinese Acad Sci Inst Semicond Lab Semicond Mat Sci Beijing 100083 Peoples R China.
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Lu DC,Lin LY,Lu DC Chinese Acad Sci Inst Semicond Lab Semicond Mat Sci Beijing 100083 Peoples R China.. Thermodynamic analysis of GaSb-GaCl3 vapor phase epitaxy[C]. 8-10 RUE MARIO NIKIS, 75738 PARIS, FRANCE:EUROPEAN SPACE AGENCY,2001:425-430.
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