Real-time far distance micro-vibration measurement using an external cavity semiconductor laser interferometer with a feedback control system

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Real-time far distance micro-vibration measurement using an external cavity semiconductor laser interferometer with a feedback control system
	Zhao WR; Jiang PF; Xie FZ; Zhao WR Chinese Acad Sci Inst Semicond Beijing 100083 Peoples R China.
	2002
会议名称	Conference on Optical Design and Testing
会议录名称	OPTICAL DESIGN AND TESTING, 4927
页码	770-774
会议日期	OCT 15-18, 2002
会议地点	SHANGHAI, PEOPLES R CHINA
出版地	1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
出版者	SPIE-INT SOC OPTICAL ENGINEERING
ISSN	0277-786X
ISBN	0-8194-4716-1
部门归属	chinese acad sci, inst semicond, beijing 100083, peoples r china
摘要	An external cavity semiconductor laser interferometer used to measure far distance micro-vibration in real time is proposed. In the interferometer, a single longitudinal mode and excellent coherent characteristic grating external cavity semiconductor laser is constructed and acted as a light source and a phase compensator. Its coherent length exceeds 200 meters. The angle between normal and incidence beam of the far object is allowed to change in definite range during the measurement with this interferometer, and this makes the far distance interference measurement easier and more convenient. Also, it is not required to keep the amplitudes of the first and second harmonic components equal, and then the dynamic range is increased. A feedback control system is used to compensate the phase disturbance between the two interference beams introduced by environmental vibration.
关键词	External Cavity Semiconductor Laser Interferometer Far Distance Micro-vibration Measurement Feedback Control Displacement Measurement Diode Interferometer Phase
学科领域	光电子学
主办者	SPIE.; Chinese Opt Soc.
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/13615
专题	中国科学院半导体研究所（2009年前）
通讯作者	Zhao WR Chinese Acad Sci Inst Semicond Beijing 100083 Peoples R China.
推荐引用方式 GB/T 7714	Zhao WR,Jiang PF,Xie FZ,et al. Real-time far distance micro-vibration measurement using an external cavity semiconductor laser interferometer with a feedback control system[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2002:770-774.

条目包含的文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
2797.pdf（137KB）			限制开放	--	请求全文