MMI optical couplers and switches with SOI technology

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	MMI optical couplers and switches with SOI technology
	Yu JZ; Wang XL; Liu JW; Yan QF; Xia JS; Fan ZC; Wang ZT; Chen SW; Yu JZ Chinese Acad Sci Inst Semicond State Key Lab Integrated Optoelect Beijing 100083 Peoples R China.
	2003
会议名称	6th Chinese Optoelectronics Symposium
会议录名称	PROCEEDINGS OF THE SIXTH CHINESE OPTOELECTRONICS SYMPOSIUM
页码	251-254
会议日期	SEP 12-14, 2003
会议地点	KOWLOON, PEOPLES R CHINA
出版地	345 E 47TH ST, NEW YORK, NY 10017 USA
出版者	IEEE
ISBN	0-7803-7887-3
部门归属	chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
摘要	MMI (multimode interference) coupler, modulator and switch based on SOI (silicon- on-insulator) have been become more and more attractive in optical systems since they show important performances. SiO2 thin cladding layers (<1.0mum) can be used in SOI waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. The design and fabrication of multimode interference (MMI) optical coupler, modulator and switche in SOI technology are presented in the paper. The results demonstrated that the modulator has an extinction ratio of -11.0dB and excess loss of -2.5dB, while the optical switch has a crosstalk of -12.5dB and responding time of less than 20 mus.
关键词	Wave-guides
学科领域	光电子学
主办者	Hong Kong Baptist Univ.; Chinese Univ Hong Kong.; City Univ Hong Kong.; Hong Kong Polytech Univ.; Univ Hong Kong.; IEEE LEOS Hong Kong Chapter.; AIXTRON AG.; Kopin Corp.; Oxford Instruments Teltec Semiconductor Pacific Ltd.; Hong Kong Sci & Technol Pk Corp.; Soc Informat Display Hong Kong Chapter.
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/13573
专题	中国科学院半导体研究所（2009年前）
通讯作者	Yu JZ Chinese Acad Sci Inst Semicond State Key Lab Integrated Optoelect Beijing 100083 Peoples R China.
推荐引用方式 GB/T 7714	Yu JZ,Wang XL,Liu JW,et al. MMI optical couplers and switches with SOI technology[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2003:251-254.

条目包含的文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
2770.pdf（232KB）			限制开放	--	请求全文