Preparation and AFM characterization of self-ordered porous alumina films on semi-insulated gaas substrate

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Preparation and AFM characterization of self-ordered porous alumina films on semi-insulated gaas substrate
	Zhou HY; Qu SC; Wang ZG; Liang LY; Cheng BC; Liu JP; Peng WQ; Zhou, HY, Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China. 电子邮箱地址: zhouhy@mail.semi.ac.cn
	2006
会议名称	11th Conference on Defects Recognition Imaging and Physics in Semiconductors
会议录名称	MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
页码	9 (1-3): 337-340
会议日期	SEP 13-19, 2005
会议地点	Beijing, PEOPLES R CHINA
出版地	THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, OXON, ENGLAND
出版者	ELSEVIER SCI LTD
ISSN	1369-8001
部门归属	chinese acad sci, inst semicond, key lab semicond mat sci, beijing 100083, peoples r china
摘要	Self-ordered porous alumina films on a semi-insulated GaAs substrate were prepared in oxalic acid aqueous solutions by three-step anodization. The I-t curve of anodization process was recorded to observe time effects of anodization. Atomic force microscopy was used to investigate structure and morphology of alumina films. It was revealed that the case of oxalic acid resulted in a self-ordered porous structure, with the pore diameters of 60-70 nm, the pore density of the order of about 10(10) pore cm(-2), and interpore distances of 95-100nm. At the same time the pore size and shape change with the pore widening time. Field-enhanced dissolution model and theory of deformation relaxation combined were brought forward to be the cause of self-ordered pore structure according to I-t curve of anodization and structure characteristics of porous alumina films. (c) 2006 Elsevier Ltd. All rights reserved.
关键词	Anodic Alumina Films
学科领域	半导体材料
收录类别	CPCI（ISTP）
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/10002
专题	中国科学院半导体研究所（2009年前）
通讯作者	Zhou, HY, Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China. 电子邮箱地址: zhouhy@mail.semi.ac.cn
推荐引用方式 GB/T 7714	Zhou HY,Qu SC,Wang ZG,et al. Preparation and AFM characterization of self-ordered porous alumina films on semi-insulated gaas substrate[C]. THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, OXON, ENGLAND:ELSEVIER SCI LTD,2006:9 (1-3): 337-340.

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