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中国科学院半导体研究所机构知识库
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中科院半导体照明研发... [1]
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AlN材料外延技术及其应用研究
学位论文
, 北京: 中国科学院大学, 2017
Authors:
杜泽杰
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Submit date：2017/05/27
金属有机化合物气相沉积（mocvd）
深紫外led
氮化铝（aln）
成核层
