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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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半导体集成技术工程研... [1]
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2010 [1]
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Funding Organization：The authors greatly acknowledge the support from the National Basic Research Program of China (973 Program) under the grant number 2010CB934104, and National Natural Science Foundation of China under the grant number of 60606024.
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期刊论文
Authors:
Li YQ (Li Yueqiang)
;
Wang XD (Wang Xiaodong)
;
Xu XN (Xu Xiaona)
;
Liu W (Liu Wen)
;
Chen YL (Chen Yanling)
;
Yang FH (Yang Fuhua)
;
Tan PH (Tan Pingheng)
;
Zeng YP (Zeng Yiping)
;
Li, YQ, Chinese AcadSci, InstSemicond, Engn Res CtrSemicond Integrated Technol, Beijing 100083, Peoples R China. 电子邮箱地址: xdwang@semi.ac.cn
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Submit date：2010/11/14
