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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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中国科学院半导体研究... [3]
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赵永梅 [1]
刘兴昉 [1]
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2007 [3]
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宽带隙半导体材料SiC 外延生长工艺的研究
学位论文
, 北京: 中国科学院半导体研究所, 2007
Authors:
李家业
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View/Download:1005/33
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Submit date:2009/04/13
Heavily doped polycrystalline 3C-SiC growth on SiO2/Si(100) substrates for resonator applications
会议论文
Silicon Carbide and Related Materials 2006丛书标题: MATERIALS SCIENCE FORUM, Newcastle upon Tyne, ENGLAND, SEP, 2006
Authors:
Sun, G (Sun, Guosheng)
;
Ning, J (Ning, Jin)
;
Liu, X (Liu, Xingfang)
;
Zhao, Y (Zhao, Yongmei)
;
Li, J (Li, Jiaye)
;
Wang, L (Wang, Lei)
;
Zhao, W (Zhao, Wanshun)
;
Wang, L (Wang, Liang)
;
Sun, G, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China.
Adobe PDF(992Kb)
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View/Download:1647/222
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Submit date:2010/03/29
Polycrystalline 3c-sic
Resonator
Doping
Silicon-carbide
无权访问的条目
期刊论文
Authors:
Li Jiaye
;
Zhao Yongmei
;
Liu Xingfang
;
Sun Guosheng
;
Luo Muchang
;
Wang Lei
;
Zhao Wanshun
;
Zeng Yiping
;
Li Jinmin
Adobe PDF(323Kb)
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View/Download:1022/397
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Submit date:2010/11/23