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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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真空科学与技术学报 [1]
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国家自然科学基金(N... [1]
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Funding Organization：国家自然科学基金(No.6 176 6)资助
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期刊论文
Authors:
牛智红
;
任正伟
;
贺振宏
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Submit date：2010/11/23
